產(chǎn)品分類(lèi)
真空退火設(shè)備
所屬分類(lèi):
第一代半導(dǎo)體工藝設(shè)備
概要:
◆ 主要用于半導(dǎo)體器件退火及燒結(jié)等工藝,可進(jìn)行真空、氣體保護(hù)等 ◆ 設(shè)備結(jié)構(gòu)新穎,操作方便 ◆ 在一臺(tái)設(shè)備上可以完成多個(gè)工藝流程
關(guān)鍵詞:
真空退火
真空退火設(shè)備
產(chǎn)品概述/Product Introduction:
♦ 主要用于半導(dǎo)體器件退火及燒結(jié)等工藝,可進(jìn)行真空、氣體保護(hù)等
Mainly used for annealing and sintering of semiconductor devices, and can be protected by vacuum and gas
♦ 設(shè)備結(jié)構(gòu)新穎,操作方便
The equipment has novel structure and convenient operation
♦ 在一臺(tái)設(shè)備上可以完成多個(gè)工藝流程
Multiple process flows can be completed on one equipment
產(chǎn)品特點(diǎn)/Product Characteristics:
♦ 自動(dòng)化程度高
High degree of automation
♦ 采用進(jìn)口溫度控制器,溫控器能受控運(yùn)行、停止、保持,靈活控制工藝溫度變化
Adopting imported temperature controller, the temperature controllercan be controlled to run, stop andmaintain, and flexibly control the process temperature change
♦ 電氣元器件采用進(jìn)口知名品牌元器件,保證了設(shè)備具有較好的穩(wěn)定性、可靠性
The electrical components are imported well-known brand components, which ensures good stability andreliability of the equipment
♦ 處理全過(guò)程由工業(yè)計(jì)算機(jī)智能化自動(dòng)控制化能夠?qū)崿F(xiàn)全程監(jiān)控、跟蹤、自診斷功能、模擬顯示設(shè)備的工作狀態(tài),升溫和降溫速度可控
The whole processing process is controlled by industrial computer intelligently and automatically, which canrealize the functions of whole process monitoring,tracking and self-diagnosis, simulate and display the workingstate of equipment, and control the heating and cooling speed
技術(shù)指標(biāo)/Technical Indicators:
最高溫度:200-800℃ Maximum temperature: 200-800℃ |
恒溫區(qū):1200mm(長(zhǎng)度可定制) Constant temperature zone: 1200mm (length can be customized) |
控溫精度:±1℃ Temperature control accuracy: ± 1℃ |
真空室:2-3工位 Vacuum chamber: 2-3 stations |
真空度:≤5*10-4*pa Vacuum degree:≤5*10-4*pa |
升溫速率:15℃/min Heating rate: 15℃/min |
氣氛保護(hù):快速開(kāi)啟式安全閥等 Atmosphere protection: quick opening safetyvalve, etc. |
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